


Samsung plans to invest 10 trillion won in semiconductor equipment and purchase ASML EUV lithography machines in large quantities
Samsung plans to increase imports of more ASML extreme ultraviolet (EUV) lithography equipment, according to a report from South Korea's Electronic News Today

Although The confidentiality clause in the contract did not reveal specific details, but according to securities market news, this agreement will allow ASML to provide a total of 50 sets of equipment within five years, with a unit price of approximately 200 billion won (approximately 1.102 billion yuan) for each equipment. , with a total value of up to 10 trillion won (approximately 55.1 billion yuan)
It is unclear whether the products in its contract are existing EUV lithography equipment or next-generation "High NA EUV" lithography equipment . However, the biggest problem with current EUV lithography equipment is limited output. According to officials, it is "more complex than satellite components" and can only be produced in very limited quantities each year. It is said that there were 40 units last year, and ASML estimates it will be 60 units this year. There are currently five manufacturers that need and can purchase EUV lithography equipment: Samsung Electronics, TSMC, Intel, SK Hynix and Micron. Among them, TSMC accounts for about 70% of the supply, leaving four companies competing for the remaining 30%.
Samsung Electronics launched the world’s first 3nm foundry technology using all-gate (GAA) technology in June last year, so the company has been working hard to secure the purchase of more EUV lithography equipment, targeting next year The second-generation process will enter the 3nm generation in the first half of the year, the 2nm process in 2025, and the 1.4nm process in 2027.
Therefore, Chairman Lee Jae-yong went to ASML headquarters last June to discuss EUV procurement issues with CEO Peter Bennink. During his visit to South Korea last November, he held further talks with Bennink. Considering that the delivery cycle of EUV takes at least one year, these meetings seem to have achieved practical results
In fact, analysts in the semiconductor field are also positive about Samsung Electronics' plan to purchase additional EUV lithography equipment.
Lee Jong-hwan, professor of system semiconductor engineering at Sangmyung University, said: "Samsung has introduced dozens of EUV lithography equipment. Each equipment is said to cost about 200 billion won, which shows that the company intends to expand the volume of 3nm chips. production, and plans to achieve 2nm production in the future."
Samsung Electronics previously announced plans to have 100 EUV lithography machines by 2025. The market estimates that Samsung currently has about 40 EUV machines. If these 50 devices can be delivered as scheduled, Samsung will be able to have about 100 devices by 2028
Park Byung-hun, the Korean representative of the Netherlands Institute for Applied Sciences (TNO) explained: "Generally, semiconductor processes 10% of each machine can be used for process R&D and testing, and having 100 machines means they can be used for R&D around the clock."
He also pointed out, "By doing this, we will be able to ensure that there are enough process capabilities to use the equipment correctly," he added, "This is expected to reduce time and cost during the process and increase yields."
"Once we have a large number of (EUV) equipment, and As the technology stabilizes, we will be able to increase production and make progress in foundry manufacturing," said Kim Yang-pang, an expert researcher at the Industrial Research Institute.
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