Non-lithography solution, Canon begins selling 5nm chip production equipment

According to news from this site on October 14, Canon recently issued a press release and began selling chip production equipment FPA-1200NZ2C. stated that it can manufacture 5 nm chips using a solution different from complex photolithography technology.

Canon said the production equipment works differently from industry leader ASML. It is more similar to printing than photolithography. It does not use the principle of image projection to transfer the microstructure of integrated circuits to silicon wafers

This set of equipment can be applied to a minimum of 14 square millimeters silicon wafers, can produce chips equivalent to the 5nm process.

Canon stated that it will continue to improve and develop this system, and is expected to be used to produce 2nm chips in the future.

Note from this site: Nanoprinted lithography is generally considered a low-cost alternative to optical lithography, and memory chip manufacturers such as SK Hynix and Kioxia have tried to use it in the past. Kioxia had previously conducted tests, but potential customers complained that the product had a high defect rate and ultimately gave up.

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